Removal of the photoresist (PR) and metallic-polymer in the concave-typed storage node using the excimer laser

Applied Surface Science

Volumn 228, Issue 1-4, 2004, Pages 100-109

  Kim, Hyun Jung ^a   Kim, Dae Jin ^a   Ryu, Je Kil ^a   Pak, Sung Sik ^a  

^a Hantech Co Ltd Korea   (South Korea)

Author keywords

Homogenizer; KrF excimer laser; Laser cleaning; Photoresist removal; Polymer removal; Ruthenium

Indexed keywords

CAPACITORS; DYNAMIC RANDOM ACCESS STORAGE; KRYPTON; LEAKAGE CURRENTS; MORPHOLOGY; PERMITTIVITY; PHOTOCHEMICAL REACTIONS; PHOTORESISTS; REACTIVE ION ETCHING; RUTHENIUM; SCANNING ELECTRON MICROSCOPY;

HOMOGENIZERS; KRF EXCIMER LASERS; LASER CLEANING; PHOTORESIST REMOVAL; POLYMER REMOVAL;

EXCIMER LASERS;

EID: 1942517832     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2003.12.029     Document Type: Article

References (20)

1. W.M. Lee, Technical Report. EKC Technology Inc., 2000.
2. S.J. Kirk, T.T. Nguyen, in: Technical Proceedings, Singapore, 1995.
3. Kim Y.K., Kim D.J., Ryu J.K. Proc. SPIE. 4274:2001;9.
4. Livshites B., Tehar-Zahav O., Iskevitch E., Genut M. Solid State Technol. 197:1997;197.
5. Y.P. Lee, Y.F. Lu, S.H.C. Daniel, J. Appl. Phys. 28 (1997) 2524.
6. Magee T.J., Leung C.S. Particles Surf. 3:1991;307.
7. A.C. Engelsberg, Removal of surface contamination using dry, laser-assisted process, Paper given at Microcontamnation 93, San Jose, CA, USA, 1993.
8. Braun A., Otte K., Zimmer K. Appl. Phys. A. 69:1999;S339.
9. W.W. Duley, UV laser: effects and applications in materials science, Cambridge University Press, Cambridge, UK, 1996.
10. Srinivasan R., Smrtic M.A., Babu V.S. J. Appl. Phys. 59:1998;3861.
11. Srinivasan R. Appl. Phys. A. 56:1993;417.
12. P.W. Atkins, Physical Chemistry, fifth ed., Oxford University Press, Oxford, 1994.
13. T.L. Cottrell, Butterworths, London, 1954, p. 272.
14. Kim D.J., Kim Y.K., Ryu J.K., Kim H.J. Jpn. J. Appl. Phys. 41:2002;4563.
15. Lu Y.F., Choi W.K. J. Appl. Phys. 80:1996;7052.
16. Braun A., Zimmer K. Appl. Surf. Sci. 186:2002;200.
17. Tam A.C. J. Appl. Phys. 71:1992;3515.
18. Baeri P., Foti G., Poate J.M., Cullis A.G. Phys. Rev. Lett. 45:1980;2036.
19. JF. Sceckelford, CRC Materials Science and Engineering Handbook, CRC Press, Boca Raton, 1994.
20. E.D. Palik, Handbook of Optical Constants of Solids, Academic Press, Orlando, 1985.