Steam laser cleaning of plasma-etch-induced polymers from via holes

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 5 A, 1998, Pages 2524-2529

  Lee, Yuan Ping ^a   Lu, Yong Feng ^a   Chan, Daniel S H ^a   Low, Teck Seng ^a   Zhou, Mei Sheng ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b CHARTERED SEMICONDUCTOR MANUFACTURING LTD   (Singapore)

Author keywords

Creation of bubbles; Excimer laser irradiation; Explosive evaporation; Isopropanol film; Steam laser cleaning

Indexed keywords

FILMS; LASER APPLICATIONS; PLASMA ETCHING; POLYMERS;

EXCIMER LASER IRRADIATION;

CLEANING;

EID: 0032063772     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.2524     Document Type: Article

References (18)

1. K. Yoneda: Tech. Proc. Semicon Japan (1991) p. 162.
2. V. Comello: Semicond. Int. (1991) 76.
3. N. Yoshida: Tech. Proc. Semicon Japan (1991) p. 127.
4. M. K. Shi, B. Lamontagne, A. Selmani and L. Martinu: J. Vac. Sci. Technol. A 12 (1994) 44.
5. P. J. John and J. Liang: J. Vac. Sci. Technol. A 12 (1994) 199.
6. W. Zapka, W. Ziemlich, W. P. Leung and A. C. Tam: Microelectron. Eng. 20 (1993) 171.
7. T. J. Magee and C. S. Leung: Particles on Surfaces (Plenium Press, New York, 1991) Vol. 3, p. 307.
8. Y. F. Lu, S. Komuro and Y. Aoyagi: Jpn. J. Appl. Phys. 33 (1994) 4691.
9. Y. F. Lu, Y. Aoyagi, M. Takai and S. Namba: Jpn. J. Appl. Phys. 33 (1994) 7138.
10. A. C. Engelsberg: Microcontamination 93, USA (1993).
11. K. Mann, B. Wolff-Rottke and F. Müller: SPIE Proc. Boulder Damage Symp., USA (1994).
12. A. C. Tam, W. P. Leung, W. Zapka and W. Ziemlich: J. Appl. Phys. 71 (1992) 3515.
13. K. Imen, S. J. Lee and S. D. Allen: Appl. Phys. Lett. 58 (1991) 203.
14. E. D. Palik: Handbook of Optical Constants of Solids (Academic Press, Orlando, 1985) p. 759.
15. R. Srinivasan: Appl. Phys. A 56 (1993) 417.
16. V. P. Carey: Liquid-Vapour Phase-Change Phenomena (Hemisphere, Washington, 1992) pp. 169-213, pp. 57-83.
17. D. R. Lide and H. V. Kehiaian: CRC Handbook of Thermophysical and Thermochemical Data (CRC Press, Boca Raton, 1994) pp. 34-109, p. 204, pp. 409-417.
18. P. Heinz-Helmut: UV- VIS Atlas of Organic Compounds (VCH Publishers, Weinheim, 1992) 2nd ed., pp. 1237 and 1234.