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Volumn 3, Issue , 2003, Pages 101-106

Tether system designed for flip-chip bonded MEMS

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; COMPACTION; COST EFFECTIVENESS; FLIP CHIP DEVICES; HYDROFLUORIC ACID; MATHEMATICAL MODELS; MECHANICAL ENGINEERING; PRINTED CIRCUIT BOARDS; STRESS CONCENTRATION;

EID: 1942472579     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2003-42422     Document Type: Conference Paper
Times cited : (4)

References (9)
  • 1
    • 0001481987 scopus 로고
    • Geometric optimization of controlled collapse interconnections
    • L. S. Goldmann, "Geometric optimization of controlled collapse interconnections," IBM J. Res. Develop., vol 13, no. 3, pp. 251-265, 1969.
    • (1969) IBM J. Res. Develop. , vol.13 , Issue.3 , pp. 251-265
    • Goldmann, L.S.1
  • 2
    • 0033316630 scopus 로고    scopus 로고
    • Flip-chip development using recessed bonding pads for laser/MEMS integration
    • M. A. Rosa, and D. Sun, "Flip-chip development using recessed bonding pads for laser/MEMS integration," SPIE, vol 3891, pp. 416-426, 1999.
    • (1999) SPIE , vol.3891 , pp. 416-426
    • Rosa, M.A.1    Sun, D.2
  • 6
    • 0041663540 scopus 로고    scopus 로고
    • Micro-bias-bees using micromachined flip-chip inductors
    • June 8-13, Philadelphia USA
    • P. Bell, N. Hoivik, V. M. Bright and Z. Popovic, "Micro-bias-bees using micromachined flip-chip inductors", presented at the MTT-S Conference June 8-13, 2003, Philadelphia USA.
    • (2003) MTT-S Conference
    • Bell, P.1    Hoivik, N.2    Bright, V.M.3    Popovic, Z.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.