Mechatronic micro devices

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 1999, Pages 27-34

  Michel, Frank ^a   Ehrfeld, Wolfgang ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC MOTORS; GEARS; MICROACTUATORS; PIEZOELECTRIC DEVICES;

ELECTROMAGNETIC MOTORS; GEAR PUMPS; MICROGEARS; MICROSYSTEMS;

MECHATRONICS;

EID: 0033313084     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)