Messtechnik an mikro- und nanostrukturierten Längenteilungen

PTB - Mitteilungen Forschen und Prufen

Volumn 114, Issue 1, 2004, Pages 25-35

  Flügge, Jens ^a   Köning, Rainer ^a   Häßler Grohne, Wolfgang ^a   Dziomba, Thorsten ^a   Bosse, Harald ^a  

^a PTB Arbeitsgruppe Langenteilungen ^*  (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 19244373287     PISSN: 0030834X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (21)

1. Kunzmann, H.; Pfeifer, T.; Flügge, J.: Scales vs. Laserinterferometers. Performance and Comparison of Two Measurement Systems. Annals of the CIRP Vol. 42, (1993), Heft 2, S. 753-767
2. Roeth, K. D.; Schlueter, G.: Actual performance data obtained on new transmitted light mask metrology system. Proc. EMC 18, München, GMM-Fachbericht 36, (2002), S. 143-149
3. Schödel, R.; Bönsch, G.: Interferometric measurements of thermal expansion, length stability and compressibility of glass ceramics. Proc. 3rd euspen intl. conf., Eindhoven, (2002), S. 691-694
4. Kim, S. O.; Solak, H. H. et al.: Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates. Nature, 424, (July 2003), S. 411-414
5. Bönsch, G.; Potulski, E.: Measurement of the refractive index of air and comparison with modified Edléns formulae. Metrologia 35, (1998), S. 133-139
6. Schellekens; P. et al.: Measurements of the refractive index of air using interference refractometers", Metrologia 22, (1986), S. 279-287
7. Bodermann, B.; Buhr, E.; Mirandé, W.: Quantitative Mikroskopie: Dimensionelle Messtechnik an Mikro- und Nanostrukturen. PTB Mitteilungen 113, (2003), Heft 4, S. 9-17
8. Flügge, J.; Köning, R.: Status of the nanometer comparator at PTB. Proc. SPIE, 4401, (2001), S. 275-283
9. Tanaka, M.; Yamagami, T.; Nahayama, K.: Linear interpolation of periodic error in a heterodyn laser interferometer at subnanometer levels. IEEE Trans. Instrum. Meas., IM 38, (1989), S. 552-554
10. Bosse, H.; Häßler-Grohne, W.; Brendel, B.: About traceability, reproducibility and comparability of grid calibrations. Proc. SPIE 3873, (1999), S. 477-483
11. Bosse, H.; Häßler-Grohne, W.; Tschirnich, J.; Flügge, J.; Bönsch, G.; Speckbacher, P.; Israel, W.: Design aspects of the international line scale comparison Nano3. Proc. Euspen 2nd Int. Conf., Vol. 1, (2001), S. 302-305
12. Bosse, H.; Häßler-Grohne, W.; Flügge, J.; Köning R.: Final report on CCL-S3 supplementary line scale comparison Nano3. Metrologia, 40 (Technical Supplement 2003) 04002 (2003); http://www.iop.org/EJ/abstract/ 0026-1394/40/1A/04002
13. Häßler-Grohne, W.; Bosse, H.: Electron optical metrology system for pattern placement measurements. Meas. Sci. Technol. 9, (1998), S. 1120-1128
14. Mirandé, W.; Frase, C. G.: Comparison of linewidth measurements on Si structures performed by Atomic Force Microscopy (AFM) and low voltage Scanning Electron Microscopy (SEM), Proc. Quantitative Microscopy (QM '99), Kopenhagen, PTB-Bericht PTB-F-34 (1999), S. 89-96
15. Schätz, Th.; Hauffe, B.; Döbereiner, S.; Brück, H.-J.; Brendel, B.; Bettin, L.; Röth, K.-D.; Steinberg, W.; Speckbacher, P.; Sedlmeier, W.; Engel, Th.; Häßler-Grohne, W.; Mirande, W.; Bosse, H.: Development and characterization of new CD mask standard: a status report. Proc. 19th EMC, GMM-Fachbericht 39, (2003), S. 37-45
16. Frase, C. G. et al.: Metrologische Charakterisierung von neu entwickelten Photomasken-Strukturbreiten-Normalen; PTB-Mitteilungen 114, (2004), S. 36-43 (in diesem Heft)
17. Garnaes, J. et al.: Proceedings of X. International Colloquium on Surfaces. Chemnitz; Shaker Verlag, Aachen, (2000), S. 277-287
18. Meli, F.: International comparison in the field of nanometrology: pitch of 1D gratings (Nano4). Proc. 2nd euspen Intl. Conf., Torino, 1, (2001), S. 358-361
19. Renders, L. et al.: Normale für die dimensionelle und analytische Nanometrologie; PTB-Mitteilungen, 114 (2004), S. 16-26 (in diesem Heft)
20. Dziomba, Th.; Häßler-Grohne, W.; Bosse, H.; Danzebrink, H.-U.; Wilkening, G.: Influence of nanostandard properties on calibration procedures of SPMs. Proc. 4th International euspen conference, Vol. 2 (2003), S. 491-494
21. Yacoot, A.; Kuetgens, U.; Koenders, L.; Weimann, Th.: A combined scanning tunnelling microscope and X-ray interferometer; Meas. Sci. Technol., 12 (2001), S. 1660-1665