Fabrication of low-loss optical-quality polymer waveguide facets in multilayer polymer devices using an inductively coupled plasma

Journal of Lightwave Technology

Volumn 23, Issue 4, 2005, Pages 1787-1790

  Diffey, William M ^a   Trimm, Rebecca H ^b   Temmen, Mark G ^a   Ashley, Paul R ^a  

^a US Army Research Development and Engineering Command   (United States)

^b AEGIS TECHNOLOGIES GROUP INC   (United States)

Author keywords

Inductively coupled plasma (ICP); Optical waveguides; Plasma materials processing applications; Polyimides

Indexed keywords

INDUCTIVELY COUPLED PLASMA; LUMINESCENT DEVICES; MULTILAYERS; PLASMA APPLICATIONS; PLASMA ETCHING; POLYIMIDES; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DIODES;

MULTILAYER POLYMER DEVICES; OPTICAL QUALITY; PLASMA MATERIALS PROCESSING APPLICATIONS; POLYMER WAVEGUIDE FACETS;

OPTICAL WAVEGUIDES;

EID: 18944401451     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2005.843839     Document Type: Article

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