Inductivity coupled plasma etching to fabricate the nonlinear optical polymer photonic crystal waveguides

Materials Science and Engineering: B

Volumn 103, Issue 2, 2003, Pages 170-176

  Inoue, Shin Ichiro ^a   Kajikawa, Kotaro ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

ICP etching; NLO polymer; Photonic crystal

Indexed keywords

ETCHING; INDUCTIVELY COUPLED PLASMA; LIGHT REFLECTION; SPECTRUM ANALYSIS; WAVEGUIDES;

PHOTONIC CRYSTAL WAVEGUIDES;

OPTICAL MATERIALS;

EID: 0041527218     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(03)00197-1     Document Type: Article

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