Laser bonding of multilayer polymer microfluidic chips

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5628, Issue , 2005, Pages 56-62

  Lai, Jianjun ^a   Yuan, Hui ^a   Yi, Xinjian ^a   Liu, Sheng ^a,b  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b Wayne State University   (United States)

Author keywords

Biochip; BioMEMS; Bonding; Laser; Microfluidic; Multilayer; Packaging; PMMA; Polymer; Stacked

Indexed keywords

ADHESIVES; BIOCOMPATIBILITY; BONDING; ELECTRONICS PACKAGING; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; MULTILAYERS; POLYMERS; POLYMETHYL METHACRYLATES;

BIOCHIPS; BIOMEMS; MICROFLUIDICS; STACKED;

LASER PULSES;

EID: 18944397314     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.576711     Document Type: Conference Paper

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