Performance of MEMS-based gas distribution and control systems for semiconductor processing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3514, Issue , 1998, Pages 159-170

  Henning, Albert K ^a   Fitch, John ^a   Harris, James M ^a   Arkilic, Errol B ^a   Cozad, Brad ^a   Dehan, Ben ^a  

^a Redwood Microsystems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW CONTROL; FLUIDICS; SEMICONDUCTOR DEVICE MANUFACTURE; VALVES (MECHANICAL);

GAS DISTRIBUTION; MASS FLOW CONTROL;

MICROELECTROMECHANICAL DEVICES;

EID: 0032301392     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)