Micro fluidic channel fabrication by PDMS-interface bonding

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5275, Issue , 2004, Pages 141-148

  Chow, Winnie W Y ^a   Lei, Kin Fong ^a   Shi, Guanyi ^b   Li, Wen J ^a   Huang, Qiang ^b  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^b BEIJING INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Hot Embossing; PDMS; PMMA

Indexed keywords

COOLING; GLASS TRANSITION; GLUING; LITHOGRAPHY; METHANOL; MICROWAVE HEATING; POLYTETRAFLUOROETHYLENES; SPIN COATING; ULTRASONICS;

BENZOCYCLOBUTENE (BCB); ELASTOMERIC POLYMER; INTERFACE BONDING; MICRO FLUIDIC CHANNEL;

POLYMETHYL METHACRYLATES;

EID: 2442562305     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.532382     Document Type: Conference Paper

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