SCOPUS 정보 검색 플랫폼

Volumn 433-436, Issue , 2003, Pages 641-644

Vacancy-Type Defect Distributions of 11B-, 14N- and 27Al-Implanted 4h-SiC Studied by Positron Annihilation Spectroscopy

Author keywords

Defects; Ion Implantation; Positron Annihilation Spectroscopy

Indexed keywords

ALUMINUM; BORON; DEFECTS; HYDROGEN; ION IMPLANTATION; NITROGEN; SPECTROSCOPIC ANALYSIS;

VACANCY-TYPE DEFECTS;

SILICON CARBIDE;

EID: 18744419899 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: None Document Type: Conference Paper

Times cited : (2)

References (10)

1
- 0035477012
- A. Kawasuso, F. Redmann, R. Krause-Rehberg, T. Frank, M. Weidner, J. Appl. Phys. 90 (2001), p. 3377
- (2001) J. Appl. Phys. , vol.90 , pp. 3377
- Kawasuso, A.¹ Redmann, F.² Krause-Rehberg, R.³ Frank, T.⁴ Weidner, M.⁵

2
- 0030566533
- Y. Pacaud, G. Brauer, R. A. Yankov, V. Heera, Nucl. Instr. & Methods in Phys. B 120 (1996), p. 177
- (1996) Nucl. Instr. & Methods in Phys. B , vol.120 , pp. 177
- Pacaud, Y.¹ Brauer, G.² Yankov, R.A.³ Heera, V.⁴

3
- 0003903556
- Springer-Verlag, Berlin
- R. Krause-Rehberg and H. S. Leipner, Positron annihilation in semicond. (Springer-Verlag, Berlin, 1999)
- (1999) Positron Annihilation in Semicond
- Krause-Rehberg, R.¹ Leipner, H.S.²

4
- 0035272934
- E. Danielsson, S.-K. Lee, C.-M. Zetterling, and M. Östling, J. Electronic Materials. 30 (2001), p. 247
- (2001) J. Electronic Materials , vol.30 , pp. 247
- Danielsson, E.¹ Lee, S.-K.² Zetterling, C.-M.³ Östling, M.⁴

5
- 0242495976
- To be published
- M. S. Janson, J. Slotte, A. Y. Kuznetsov, K. Saarinen, and A. Hallén, To be published
- Janson, M.S.¹ Slotte, J.² Kuznetsov, A.Y.³ Saarinen, K.⁴ Hallén, A.⁵

6
- 4243243695
- S. Arpiainen, K. Saarinen, P. Hautojärvi, L. Henry, M.-F. Barthe, and C. Corbel, Phys. Rev. B 66, (2002), p. 075206, and K. Saarinen, private communication, for the S and W parameters
- (2002) Phys. Rev. B , vol.66 , pp. 075206
- Arpiainen, S.¹ Saarinen, K.² Hautojärvi, P.³ Henry, L.⁴ Barthe, M.-F.⁵ Corbel, C.⁶

7
- 4243243695
- private communication, for the S and W parameters
- S. Arpiainen, K. Saarinen, P. Hautojärvi, L. Henry, M.-F. Barthe, and C. Corbel, Phys. Rev. B 66, (2002), p. 075206, and K. Saarinen, private communication, for the S and W parameters
- Saarinen, K.¹

8
- 0001374507
- G. Brauer, W. Anwand, P. G. Coleman, J. Stormer, F. Plazaola, J. Phys: Cond. Mat. 10 (1998), p. 1147
- (1998) J. Phys: Cond. Mat. , vol.10 , pp. 1147
- Brauer, G.¹ Anwand, W.² Coleman, P.G.³ Stormer, J.⁴ Plazaola, F.⁵

9
- 0034670910
- M.-F. Barthe, L. Henry, C. Corbel, G. Blondiaux, K. Saarinen, P. Hautojärvi, E. Hugonnard, L. D. Cioccio, F. Letertre, and B. Ghyselen, Phys. Rev. B 62 (2000), p. 16638
- (2000) Phys. Rev. B , vol.62 , pp. 16638
- Barthe, M.-F.¹ Henry, L.² Corbel, C.³ Blondiaux, G.⁴ Saarinen, K.⁵ Hautojärvi, P.⁶ Hugonnard, E.⁷ Cioccio, L.D.⁸ Letertre, F.⁹ Ghyselen, B.¹⁰

10
- 0242412681
- respectively. M.S. Janson to be published
- M. S. Janson, simulations performed using the binary collision approximation code for crystalline targets SiiMPL using displacement energies 20 and 35 eV for C and Si, respectively. M.S. Janson to be published
- Simulations Performed Using the Binary Collision Approximation Code for Crystalline Targets SiiMPL Using Displacement Energies 20 and 35 eV for C and Si
- Janson, M.S.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.