Liquid-delivery MOCVD of strontium bismuth tantalate thin films using Sr[Ta(OC2H5)5(OCH2CH 2OCH3)]2 and Liquid Bi(CH2CH=CH 2)3 as precursors

Chemical Vapor Deposition

Volumn 11, Issue 4, 2005, Pages 213-218

  Hyeon, Ji Young ^a   Lisker, Marco ^a   Silinskas, Mindaugas ^a   Burte, Edmund ^a   Edelmann, Frank T ^a  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

Ferroelectrics; Liquid delivery MOCVD; Strontium Bismuth Tantalate; Triallylbismuth

Indexed keywords

BISMUTH COMPOUNDS; CHARACTERIZATION; CHEMICAL BONDS; ELLIPSOMETRY; FERROELECTRIC MATERIALS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PULSED LASER DEPOSITION; RANDOM ACCESS STORAGE; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

LIQUID-DELIVERY MOCVD; PRECURSORS; STRONTIUM BISMUTH TANTALATE; TRIALLYLBISMUTH;

STRONTIUM COMPOUNDS;

EID: 18744385570     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/cvde.200406335     Document Type: Article

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