Liquid-delivery metal-organic CVD of strontium bismuth tantalate thin films using Sr[Ta(OC2H5)5(OC2H 4OCH3)]2 and Bi(C6H 5)3 precursors

Chemical Vapor Deposition

Volumn 8, Issue 5, 2002, Pages 221-225

  Shin, Woong Chul ^b   Choi, Kyu Jeong ^a   Seong, Nak Jin ^a   Choi, Eun Suck ^a   Kim, Byoung Hee ^a   Yoon, Soon Gil ^a  

^a Chungnam National University   (South Korea)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Ferroelectrics; Hysteresis loop; Liquid delivery MOCVD; Remanent polarization

Indexed keywords

ANNEALING; COERCIVE FORCE; CRYSTAL ORIENTATION; CRYSTALLIZATION; FERROELECTRICITY; FILM GROWTH; MAGNETIC HYSTERESIS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MIXTURES; POLARIZATION; STOICHIOMETRY; STRONTIUM COMPOUNDS; THERMAL EFFECTS;

FERRORELECTRICS; HYSTERESIS LOOP; LIQUID DELIVERY MOCVD; REMANENT POLARIZATION;

FERROELECTRIC THIN FILMS;

EID: 0040672014     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3862(20020903)8:5<221::AID-CVDE221>3.0.CO;2-C     Document Type: Article

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