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Volumn 396, Issue , 1996, Pages 149-154
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Lateral sputtering by gas cluster ion beams and its applications to atomic level surface modification
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMS;
CARBON DIOXIDE;
COMPUTER SIMULATION;
GASES;
ION BEAMS;
MOLECULAR DYNAMICS;
NITROGEN OXIDES;
SPUTTERING;
SUBSTRATES;
SULFUR COMPOUNDS;
SURFACE TREATMENT;
VACUUM APPLICATIONS;
GAS CLUSTER ION BEAM EQUIPMENT;
LAVAL NOZZLE;
SURFACE SMOOTHING;
ION BOMBARDMENT;
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EID: 0029705652
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (36)
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References (13)
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