Electrostatic actuation of surface/bulk micromachined single-crystal silicon microresonators

IEEE International Conference on Intelligent Robots and Systems

Volumn 2, Issue , 1999, Pages 1057-1062

  Lee, Sangwoo ^a   Park, Sangjun ^a   Yi, Sangwoo ^a   Lee, Sangchul ^a   Cho, Dong il Dan ^a   Ha, Byeoungju ^a   Oh, Yongsoo ^a   Song, Cimoo ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN; ELECTRIC POWER SUPPLIES TO APPARATUS; ELECTRODES; MICROMACHINING; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS;

ELECTROSTATIC ACTUATION; JUNCTION ISOLATION METHOD; POLYCRYSTALLINE SILICON; SURFACE MICROMACHINING;

CRYSTAL RESONATORS;

EID: 0033313159     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)