SCOPUS 정보 검색 플랫폼

Journal of the Electrochemical Society

Volumn 152, Issue 4, 2005, Pages

A kinetic model for boron and phosphorus doping in silicon epitaxy by CVD

(2) Mehta, Bhavesh a Tao, Meng a

a University of Texas at Arlington (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ADSORPTION; CHEMICAL VAPOR DEPOSITION; CONCENTRATION (PROCESS); DEPOSITION; MATHEMATICAL MODELS; PHOSPHORUS; REACTION KINETICS;

COLLISION THEORY; KINETIC BEHAVIOR; KINETIC MODELS; SILICON EPITAXY;

SILICON;

EID: 18444409352 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1864452 Document Type: Article

Times cited : (41)

References (44)

1
- 36549093561
- B. S. Meyerson, F. K. LeGoues, T. N. Nguyen, and D. L. Harame, Appl. Phys. Lett., 50, 113 (1987).
- (1987) Appl. Phys. Lett. , vol.50 , pp. 113
- Meyerson, B.S.¹ LeGoues, F.K.² Nguyen, T.N.³ Harame, D.L.⁴

2
- 0022768293
- S. Nakayama, I. Kawashima, and J. Murota, J. Electrochem. Soc., 133, 1721 (1986).
- (1986) J. Electrochem. Soc. , vol.133 , pp. 1721
- Nakayama, S.¹ Kawashima, I.² Murota, J.³

3
- 0007247323
- D. D. Kolcske, S. M. Gates, and D. B. Beach, J. Appl. Phys., 72, 4073 (1992).
- (1992) J. Appl. Phys. , vol.72 , pp. 4073
- Kolcske, D.D.¹ Gates, S.M.² Beach, D.B.³

4
- 0027662620
- P. D. Agnello, T. O. Sedgwick, and J. Cotte, J. Electrochem. Soc., 140, 2703 (1993).
- (1993) J. Electrochem. Soc. , vol.140 , pp. 2703
- Agnello, P.D.¹ Sedgwick, T.O.² Cotte, J.³

5
- 0029207688
- M. K. Sanganeria, K. E. Violette, M. C. Ozturk, G. Harris, and D. M. Maher, J. Electrochem. Soc., 142, 285 (1995).
- (1995) J. Electrochem. Soc. , vol.142 , pp. 285
- Sanganeria, M.K.¹ Violette, K.E.² Ozturk, M.C.³ Harris, G.⁴ Maher, D.M.⁵

6
- 0031360666
- G. Glass, H. Kim, M. R. Sardela, Q. Lu, J. R. A. Carlsson, J. R. Abelson, and J. E. Greene, Surf. Sci., 392, L63 (1997).
- (1997) Surf. Sci. , vol.392
- Glass, G.¹ Kim, H.² Sardela, M.R.³ Lu, Q.⁴ Carlsson, J.R.A.⁵ Abelson, J.R.⁶ Greene, J.E.⁷

7
- 0015573880
- F. C. Eversteyn and B. H. Put, J. Electrochem. Soc., 120, 106 (1973).
- (1973) J. Electrochem. Soc. , vol.120 , pp. 106
- Eversteyn, F.C.¹ Put, B.H.²

8
- 84975425420
- R. F. C. Farrow, J. Electrochem. Soc., 121, 899 (1974).
- (1974) J. Electrochem. Soc. , vol.121 , pp. 899
- Farrow, R.F.C.¹

9
- 0028436448
- J. Shiozawa, Y. Kasai, Y. Mikata, and K. Yamabe, J. Electrochem. Soc., 141, 1334 (1994).
- (1994) J. Electrochem. Soc. , vol.141 , pp. 1334
- Shiozawa, J.¹ Kasai, Y.² Mikata, Y.³ Yamabe, K.⁴

10
- 0030540775
- C. Li, S. John, E. Quinones, and S. Banerjee, J. Vac. Sci. Technol. A, 14, 170 (1996).
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 170
- Li, C.¹ John, S.² Quinones, E.³ Banerjee, S.⁴

11
- 0031331947
- D. Grotzmacher, J. Cryst. Growth, 182, 53 (1997).
- (1997) J. Cryst. Growth , vol.182 , pp. 53
- Grotzmacher, D.¹

12
- 0030087449
- H. Kuhne, A. Fisher, M. C. Ozturk, and M. K. Sananeria, J. Electrochem. Soc., 143, 634 (1996).
- (1996) J. Electrochem. Soc. , vol.143 , pp. 634
- Kuhne, H.¹ Fisher, A.² Ozturk, M.C.³ Sananeria, M.K.⁴

13
- 84975439077
- W. H. Shepherd, J. Electrochem. Soc., 115, 541 (1968).
- (1968) J. Electrochem. Soc. , vol.115 , pp. 541
- Shepherd, W.H.¹

14
- 12944251747
- J. Bloem. J. Cryst. Growth, 13/14, 302 (1972).
- (1972) J. Cryst. Growth , vol.13-14 , pp. 302
- Bloem, J.¹

15
- 0020125547
- R. Reif, J. Electrochem. Soc., 129, 1122 (1982).
- (1982) J. Electrochem. Soc. , vol.129 , pp. 1122
- Reif, R.¹

16
- 0000535022
- M. L. Yu and B. S. Meyerson, J. Vac. Sci. Technol. A, 2, 446 (1984).
- (1984) J. Vac. Sci. Technol. A , vol.2 , pp. 446
- Yu, M.L.¹ Meyerson, B.S.²

17
- 0029544934
- X. Huang, P. Han, Y. Shi, Y. Zheng, L. Hu, R. Wang, and S. Zhu, Mater. Sci. Forum, 196/201, 349 (1995).
- (1995) Mater. Sci. Forum , vol.196-201 , pp. 349
- Huang, X.¹ Han, P.² Shi, Y.³ Zheng, Y.⁴ Hu, L.⁵ Wang, R.⁶ Zhu, S.⁷

18
- 0020202883
- H. Kurokawa, J. Electrochem. Soc., 129, 2620 (1982).
- (1982) J. Electrochem. Soc. , vol.129 , pp. 2620
- Kurokawa, H.¹

19
- 0021515644
- B. S. Meyerson and M. L. Yu, J. Electrochem. Soc., 131, 2366 (1984).
- (1984) J. Electrochem. Soc. , vol.131 , pp. 2366
- Meyerson, B.S.¹ Yu, M.L.²

20
- 0014570031
- T. B. Swanson and R. N. Tucker, J. Electrochem. Soc., 116, 1271 (1969).
- (1969) J. Electrochem. Soc. , vol.116 , pp. 1271
- Swanson, T.B.¹ Tucker, R.N.²

21
- 0016114041
- J. Bloem, L. J. Giling, and M. W. M. Graef, J. Electrochem. Soc., 121, 1354 (1974).
- (1974) J. Electrochem. Soc. , vol.121 , pp. 1354
- Bloem, J.¹ Giling, L.J.² Graef, M.W.M.³

22
- 0006534239
- M. Racanelli and D. W. Greve, J. Vac. Sci. Technol. B, 9, 2017 (1991).
- (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 2017
- Racanelli, M.¹ Greve, D.W.²

23
- 0027539759
- M. Tao, Thin Solid Films, 223, 201 (1993).
- (1993) Thin Solid Films , vol.223 , pp. 201
- Tao, M.¹

24
- 0041161644
- M. Tao, Thin Solid Films, 307, 71 (1997).
- (1997) Thin Solid Films , vol.307 , pp. 71
- Tao, M.¹

25
- 3242824890
- M. Tao, J. Appl. Phys., 87, 3554 (2000).
- (2000) J. Appl. Phys. , vol.87 , pp. 3554
- Tao, M.¹

26
- 4544236018
- R. J. Hamers and Y. Wang, Chem. Rev. (Washington. D.C.), 96, 1261 (1996).
- (1996) Chem. Rev. (Washington. D.C.) , vol.96 , pp. 1261
- Hamers, R.J.¹ Wang, Y.²

27
- 0031381341
- R. Konecny and D. J. Doren, J. Phys. Chem. B, 101, 10983 (1997).
- (1997) J. Phys. Chem. B , vol.101 , pp. 10983
- Konecny, R.¹ Doren, D.J.²

28
- 0008550956
- T. P. Fehlner and W. S. Koski, J. Am. Chem. Soc., 86, 2733 (1964).
- (1964) J. Am. Chem. Soc. , vol.86 , pp. 2733
- Fehlner, T.P.¹ Koski, W.S.²

29
- 0001004861
- A. B. Baylis, G. A. Pressley, Jr., and F. E. Stafford, J. Am. Chem. Soc., 88, 2428 (1966).
- (1966) J. Am. Chem. Soc. , vol.88 , pp. 2428
- Baylis, A.B.¹ Pressley Jr., G.A.² Stafford, F.E.³

30
- 0018481344
- W. A. Bryant, Thin Solid Films, 60, 19 (1979).
- (1979) Thin Solid Films , vol.60 , pp. 19
- Bryant, W.A.¹

31
- 0000137575
- A. M. Beers and J. Bloem, Appl. Phys. Lett., 41, 153 (1982).
- (1982) Appl. Phys. Lett. , vol.41 , pp. 153
- Beers, A.M.¹ Bloem, J.²

32
- 51149217066
- M. Liehr, C. M. Greenlief, S. R. Kasi, and M. Offenberg, Appl. Phys. Lett., 56, 629 (1990).
- (1990) Appl. Phys. Lett. , vol.56 , pp. 629
- Liehr, M.¹ Greenlief, C.M.² Kasi, S.R.³ Offenberg, M.⁴

33
- 0029343993
- C. M. Greenlief and M. Armstrong, J. Vac. Sci. Technol. B, 13, 1810 (1995).
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 1810
- Greenlief, C.M.¹ Armstrong, M.²

34
- 0029344758
- T. O. Sedgwick and D. A. Grutzmacher, J. Electrochem. Soc., 142, 2458 (1995).
- (1995) J. Electrochem. Soc. , vol.142 , pp. 2458
- Sedgwick, T.O.¹ Grutzmacher, D.A.²

35
- 84986770406
- C. G. Newman, H. E. O'Neal, M. A. Ring, F. Leska, and N. Shipley, Int. J. Chem. Kinet., 11, 1167 (1979).
- (1979) Int. J. Chem. Kinet. , vol.11 , pp. 1167
- Newman, C.G.¹ O'Neal, H.E.² Ring, M.A.³ Leska, F.⁴ Shipley, N.⁵

36
- 84985305519
- R. T. White, R. L. Espino-Rios, D. S. Rogers,M. A. Ring, and H. E. O'Neal, Int. J. Chem. Kinet., 17, 1029 (1985).
- (1985) Int. J. Chem. Kinet. , vol.17 , pp. 1029
- White, R.T.¹ Espino-Rios, R.L.² Rogers, D.S.³ Ring, M.A.⁴ O'Neal, H.E.⁵

37
- 4143054402
- L. J. Giling, H. H. C. de Moor, W. P. J. H. Jacobs, and A. A. Saaman, J. Cryst. Growth, 78, 303 (1986).
- (1986) J. Cryst. Growth , vol.78 , pp. 303
- Giling, L.J.¹ De Moor, H.H.C.² Jacobs, W.P.J.H.³ Saaman, A.A.⁴

38
- 0343180799
- P. Rai-Choudhury and E. I. Salkovitz, J. Cryst. Growth, 7, 353 (1970).
- (1970) J. Cryst. Growth , vol.7 , pp. 353
- Rai-Choudhury, P.¹ Salkovitz, E.I.²

39
- 18444374472
- D. T. J. Hurle, R. M. Logan. and R. F. C. Farrow, J. Cryst. Growth, 12, 73 (1972).
- (1972) J. Cryst. Growth , vol.12 , pp. 73
- Hurle, D.T.J.¹ Logan, R.M.² Farrow, R.F.C.³

40
- 0037658693
- J. Bloem, J. Cryst. Growth, 31, 256 (1975).
- (1975) J. Cryst. Growth , vol.31 , pp. 256
- Bloem, J.¹

41
- 0036148523
- S. Maruno, T. Furukawa, T. Nakahata, and Y. Abe, Jpn. J. Appl. Phys., Part 1, 40, 6202 (2001).
- (2001) Jpn. J. Appl. Phys., Part 1 , vol.40 , pp. 6202
- Maruno, S.¹ Furukawa, T.² Nakahata, T.³ Abe, Y.⁴

42
- 0033363761
- P. J. Hay, R. C. Boehm, J. D. Kress, and R. L. Martin, Surf. Sci., 436, 175 (1999).
- (1999) Surf. Sci. , vol.436 , pp. 175
- Hay, P.J.¹ Boehm, R.C.² Kress, J.D.³ Martin, R.L.⁴

43
- 0000070491
- J. Perrin, Y. Takeda, N. Hirano, Y. Takeuchi, and A. Matsuda, Surf. Sci., 210, 114 (1989).
- (1989) Surf. Sci. , vol.210 , pp. 114
- Perrin, J.¹ Takeda, Y.² Hirano, N.³ Takeuchi, Y.⁴ Matsuda, A.⁵

44
- 0022387809
- J. A. del Alamo and R. M. Swanson, J. Electrochem. Soc., 132, 3011 (1985).
- (1985) J. Electrochem. Soc. , vol.132 , pp. 3011
- Del Alamo, J.A.¹ Swanson, R.M.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.