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Volumn 278, Issue 1-4, 2005, Pages 136-141
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Phosphorus-mediated growth of Ge quantum dots on Si(0 0 1)
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Author keywords
A1. Low dimensional structures; A3. Molecular beam epitaxy; A3. Quantum dots; B2. Silicon germanium semiconductor
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CRYSTAL GROWTH;
DOPING (ADDITIVES);
MOLECULAR BEAM EPITAXY;
PHOSPHORUS;
SELF ASSEMBLY;
SEMICONDUCTOR MATERIALS;
SURFACE ACTIVE AGENTS;
AREAL DENSITY;
DOPANTS;
LOW DIMENSIONAL STRUCTURES;
SILICON GERMANIUM SEMICONDUCTOR;
SEMICONDUCTOR QUANTUM DOTS;
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EID: 18444366225
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jcrysgro.2004.12.106 Document Type: Conference Paper |
Times cited : (6)
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References (19)
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