Silicon dioxide and silicon nitride as a passivation and edge termination for 4H-SiC Schottky diodes

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 1138-1141

  Sochacki, Mariusz ^a   Lukasiewicz, Radoslaw ^a,b   Rzodkiewicz, Witold ^b   Werbowy, Aleksander ^a   Szmidt, Jan ^a   Staryga, Elzbieta ^c  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

^c LODZ UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Schottky diode; Silicon carbide; Silicon dioxide; Silicon nitride

Indexed keywords

CAPACITORS; ELECTRON TRAPS; ELLIPSOMETRY; OXIDATION; PASSIVATION; REFRACTIVE INDEX; SEMICONDUCTOR MATERIALS; SILICA; SILICON NITRIDE;

BAND EDGES; BAND GAPS; EDGE TERMINATION; VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY;

SCHOTTKY BARRIER DIODES;

EID: 18444362481     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.12.020     Document Type: Conference Paper

References (11)

1. M.M. Maranowski, and J.A. Cooper Jr. IEEE Trans. Electron Devices 46 3 1999 520
2. J.A. Cooper Jr., M.R. Melloch, R. Singh, A. Agarwal, and J.W. Palmour IEEE Electron Device 49 4 2002 658
3. H.-Y. Cha, C.I. Thomas, G. Koley, L.F. Eastman, and M.G. Spencer IEEE Trans. Electron Devices 50 7 2003 1569
4. A.P. Zhang, L.B. Rowland, E.B. Kaminsky, J.W. Kretchmer, R.A. Beaupre, J.L. Garrett, J.B. Tucker, B.J. Edward, J. Foppes, and A.F. Allen Solid-State Electron. 47 2003 821
5. L.A. Lipkin, and J.W. Palmour IEEE Trans. Electron Devices 46 3 1999 525
6. C. Radtke, R.V. Brandao, R.P. Pezzi, J. Morais, I.J.R. Baumvol, and F.C. Stedile Nucl. Instrum. Methods Phys. Res. B190 2002 579
7. V.V. Afanas'ev Microelectron. Eng. 48 1999 241
8. S. Suzuki, S. Harada, R. Kosugi, J. Senzaki, W.-J. Cho, and K. Fukuda J. Appl. Phys. 92 10 2002 6230
9. P.T. Lai, J.P. Xu, and C.L. Chan IEEE Electron Device Lett. 23 7 2002 410
10. L.M. Terman Solid-State Electron. 5 1962 285
11. S.K. Cheung, and N.W. Cheung Appl. Phys. Lett. 49 2 1986 85