Properties of flexible DLC film deposited by amplitude-modulated RF p-CVD

Ceramic Engineering and Science Proceedings

Volumn 24, Issue 3, 2003, Pages 593-599

  Nakahigashi, Takahiro ^a   Miyake, Koji ^a   Oohara, Hisanori ^a  

^a Nippon ITF Inc   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; DEFORMATION; FRICTION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RESINS; RUBBER; SUBSTRATES; WEAR OF MATERIALS;

FLEXIBLE DIAMOND LIKE CARBON FILM TECHNIQUE;

DIAMOND LIKE CARBON FILMS;

EID: 0344897717     PISSN: 01966219     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1002/9780470294802.ch84     Document Type: Conference Paper

References (6)

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5. T. Nakahigashi, T. Hayashi, Y. Izumi, M. Kobayashi, H. Kuwahara and M. Nakabayashi, "Properties of a-Si:H Film Deposited by Amplitude-Modulated RF Plasma Chemical Vapour Deposition for Thin Film Transistor", Jpn. J. Appl. Phys. 36, 328-34 (1997)
6. S. Sasaki and T. Nakahigashi, "Evaluation of tribological properties of DLC coated on rubbers using nano-indentation and nano-scratch testing." p.435, Synopses of International Tribology Conference, Nagasaki, 2000