Preparation of Elastic DLC Film on Rubber by T-shape Filtered Arc Deposition

IEEJ Transactions on Fundamentals and Materials

Volumn 123, Issue 8, 2003, Pages 738-743

  Takikawa, Hirofumi ^a   Miyakawa, Nobuhide ^a   Toshifuji, Jungo ^a   Minamisawa, Shinji ^a   Sakakibara, Tateki ^a   Matsushita, Takushi ^b   Takemura, Keiko ^b  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b Fukoku Co Ltd   (Japan)

Author keywords

adherence; coefficient of friction; elastic DLC film; rubber substrate; T shape filtered arc deposition (T FAD)

Indexed keywords

EID: 1842541134     PISSN: 03854205     EISSN: 13475533     Source Type: Journal    
DOI: 10.1541/ieejfms.123.738     Document Type: Article

References (12)

1. A. Grill : “Diamond-like carbon: state of the arc”, Diam. Relat. Mater., Vol. 8, pp. 428-434 (1999).
2. J. Robertson : “Diamond-like amorphous carbon”, Mater. Sci. Eng. R, Vol. 37, pp. 129-281 (2002).
3. A. H. Lettington : “Application of diamond-like carbon thin films”, Carbon, Vol. 36, pp. 555-560 (1998).
4. F. Z. Cui and D. J. Li : “A review of investigations on biocompatibility of diamond-like carbon and carbon nitride films”, Surf. Coat. Technol., Vol. 131, pp. 481-487 (2000).
5. H. Nakamori, Y. Yoshida, and K. Suzuki : “The characteristics of the diamond-like carbon film prepared by the ion beam plating method using negative pulse bias”, T. IEE Japan., Vol. 122-A, No. 3, pp. 274-280 (2002-3) (in Japanese).
6. N. Akita, Y. Konishi, S. Ogura, M. Imamura, Y. H. Hu, and X. Shi : “Comparison of deposition method for ultra thin DLC overcoat film for MR head”, Diam. Relat. Mater., Vol. 10, pp. 1017-1023 (2001).
7. T. Nakahigashi and K. Miyake : “Application of DLC coating to rubber and polymer materials”, J. Jpn. Soc. Tribologists, Vol. 47, No. 11, pp. 833-839 (2002) (in Japanese).
8. R. L. Boxman, D. M. Sanders, and P. J. Martin (Eds.) : Handbook of Vacuum Arc Science and Technology: Fundamentals and Applications, Noyes Publications, New Jersey (1995).
9. P. J. Martin, A. Bendavid, and H. Takikawa : “Ionized plasma vapor deposition and filtered arc deposition; processes, properties and applications”, J. Vac. Sci. Technol. A, Vol. 17, pp. 2351-2359 (1999).
10. R. Miyano, K. Kimura, K. Izumi, H. Takikawa, and T. Sakakibara : “Preparation of metal nitride and oxide thin films using shielded reactive vacuum arc deposition”, Vacuum, Vol. 59, pp. 159-167 (2000).
11. H. Takikawa, K. Izumi, R. Miyano, and T. Sakakibara : “DLC thin film preparation by cathodic arc deposition with a super droplet-free system”, Surf. Coat. Technol., Vol. 163-164, pp. 368-373 (2003).
12. H. Takikawa, K. Taketomi, and T. Sakakibara : “Diamond-like carbon film produced by vacuum arc deposition technique and its surface appearance”, T. IEE Japan., Vol. 113-A, No. 9, pp. 654-658 (1993-9) (in Japanese).