Growth of InN films on (1 1 1)GaAs substrates by reactive magnetron sputtering

Applied Surface Science

Volumn 169-170, Issue , 2001, Pages 340-344

  Guo, Qixin ^a   Murata, Kiyoshi ^a   Nishio, Mitsuhiro ^a   Ogawa, Hiroshi ^a  

^a SAGA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; MAGNETRON SPUTTERING; NITRIDES; PRESSURE EFFECTS; SEMICONDUCTING GALLIUM ARSENIDE; SUBSTRATES;

INDIUM NITRIDE;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 18344412316     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00672-3     Document Type: Article

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