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Thin Solid Films

Volumn 343-344, Issue 1-2, 1999, Pages 524-527

Effects of nitrogen/argon ratio on composition and structure of InN films prepared by r.f. magnetron sputtering

(5) Guo, Qixin a Shingai, Nobuhiro a Mitsuishi, Yoshiaki a Nishio, Mitsuhiro a Ogawa, Hiroshi a

a SAGA UNIVERSITY (Japan)

Author keywords

Composition; Crystal structure; Indium nitride; Nitrogen Argon ratio; Sputtering

Indexed keywords

ARGON; AUGER ELECTRON SPECTROSCOPY; CRYSTAL STRUCTURE; FILM GROWTH; MAGNETRON SPUTTERING; NITRIDES; NITROGEN; SEMICONDUCTING INDIUM COMPOUNDS; X RAY CRYSTALLOGRAPHY;

INDIUM NITRIDE; WURTZITE STRUCTURE;

SEMICONDUCTING FILMS;

EID: 0032647174 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)01671-X Document Type: Article

Times cited : (29)

References (13)

1
- 0000815007
- S. Strite, H. Morkoc, J. Vac. Sci. Technol. B 10 (1992) 1237.
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 1237
- Strite, S.¹ Morkoc, H.²

2
- 0029779805
- S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, H. Kiyoku, Y. Sugimoto, Jpn. J. Appl. Phys. 35 (1996) L74.
- (1996) Jpn. J. Appl. Phys. , vol.35
- Nakamura, S.¹ Senoh, M.² Nagahama, S.³ Iwasa, N.⁴ Yamada, T.⁵ Matsushita, T.⁶ Kiyoku, H.⁷ Sugimoto, Y.⁸

3
- 0030572215
- I. Akasaki, S. Sota, H. Sakai, T. Tanaka, M. Koike, H. Amano, Electron. Lett. 32 (1996) 1105.
- (1996) Electron. Lett. , vol.32 , pp. 1105
- Akasaki, I.¹ Sota, S.² Sakai, H.³ Tanaka, T.⁴ Koike, M.⁵ Amano, H.⁶

4
- 0000527362
- S.K. O, rsquo;Leary, B.E. Foutz, M.S. Shur, U.V. Bhapkar, L.F. Eastman, J. Appl. Phys. 83 (1993) 826.
- (1993) J. Appl. Phys. , vol.83 , pp. 826
- Orsquo¹ Leary, S.K.² Foutz, B.E.³ Shur, M.S.⁴ Bhapkar, U.V.⁵ Eastman, L.F.⁶

5
- 0001100376
- A. Wakahara, A. Yoshida, Appl. Phys. Lett. 54 (1989) 709.
- (1989) Appl. Phys. Lett. , vol.54 , pp. 709
- Wakahara, A.¹ Yoshida, A.²

6
- 36449001011
- Q.X. Guo, H. Ogawa, H. Yamano, A. Yoshida, Appl. Phys. Lett. 66 (1995) 715.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 715
- Guo, Q.X.¹ Ogawa, H.² Yamano, H.³ Yoshida, A.⁴

7
- 0026413320
- W.E. Hoke, P.J. Lemonias, D.G. Weir, J. Crystal Growth 111 (1991) 1024.
- (1991) J. Crystal Growth , vol.111 , pp. 1024
- Hoke, W.E.¹ Lemonias, P.J.² Weir, D.G.³

8
- 0019022406
- B.R. Natarajan, A.H. Eltoukhy, J.E. Green, T.L. Barr, Thin Solid Films 69 (1980) 201.
- (1980) Thin Solid Films , vol.69 , pp. 201
- Natarajan, B.R.¹ Eltoukhy, A.H.² Green, J.E.³ Barr, T.L.⁴

9
- 0000038685
- T.L. Tansley, C.P. Foley, J. Appl. Phys. 59 (1986) 3241.
- (1986) J. Appl. Phys. , vol.59 , pp. 3241
- Tansley, T.L.¹ Foley, C.P.²

10
- 0026930318
- H. Okano, Y. Takahashi, T. Tanaka, K. Shibata, S. Nakano, Jpn. J. Appl. Phys. 31 (1992) 3446.
- (1992) Jpn. J. Appl. Phys. , vol.31 , pp. 3446
- Okano, H.¹ Takahashi, Y.² Tanaka, T.³ Shibata, K.⁴ Nakano, S.⁵

11
- 0026255726
- J. Ross, M. Rubin, Mater. Lett. 12 (1991) 215.
- (1991) Mater. Lett. , vol.12 , pp. 215
- Ross, J.¹ Rubin, M.²

12
- 0031074701
- K.B. Sundaram, A. Khan, Thin Solid Films 295 (1997) 87.
- (1997) Thin Solid Films , vol.295 , pp. 87
- Sundaram, K.B.¹ Khan, A.²

13
- 0032094122
- Q.X. Guo, N. Shingai, M. Nishio, H. Ogawa, J. Crystal Growth 189-190 (1998) 466.
- (1998) J. Crystal Growth , vol.189-190 , pp. 466
- Guo, Q.X.¹ Shingai, N.² Nishio, M.³ Ogawa, H.⁴

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