SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 611-614

Low temperature preparation of perovskite oxide films by ECR sputtering assisted with microwave treatment

(5) Matsumoto, T a Niino, A a Baba, S b Numata, K c Miyake, S a

a OSAKA UNIVERSITY (Japan)

b JAPAN SCIENCE AND TECHNOLOGY AGENCY (Japan)

c 3 2 1 Sakado Takatsu K (Japan)

Author keywords

(Ba,Sr)TiO3 (BST); Microwave; Mirror confinement type electron cyclotron resonance (MCECR); SrTiO3 (STO)

Indexed keywords

ANNEALING; CRYSTALLIZATION; ELECTRON CYCLOTRON RESONANCE; LOW TEMPERATURE EFFECTS; MICROWAVES; PLASMA CONFINEMENT; SPUTTER DEPOSITION;

PLASMA SPUTTERINGS;

PEROVSKITE;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 18144435234 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00694-7 Document Type: Article

Times cited : (7)

References (22)

1
- 84990988803
- Balk P. J. Non-Cryst. Solid. 187 1995 1
- (1995) J. Non-Cryst. Solid. , vol.187 , pp. 1
- Balk, P.¹

2
- 0033455150
- Wang X. Helmersson U. Madsen L.D. Ivanov I.P. Münger P. Rudner S. Hjörvarsson B. et al. J. Vac. Sci. Technol. A17 1999 564
- (1999) J. Vac. Sci. Technol. , vol.17 A , pp. 564
- Wang, X.¹ Helmersson, U.² Madsen, L.D.³ Ivanov, I.P.⁴ Münger, P.⁵ Rudner, S.⁶ Hjörvarsson, B.⁷

3
- 0037005664
- Samantaray C.B. Dhar A. Mukherjee M.L. Bhattacharya D. Ray S.K. Mater. Sci. Eng. B88 2002 14
- (2002) Mater. Sci. Eng. , vol.88 B , pp. 14
- Samantaray, C.B.¹ Dhar, A.² Mukherjee, M.L.³ Bhattacharya, D.⁴ Ray, S.K.⁵

4
- 0028508338
- Kuroiwa T. Tsunemine T. Horikawa T. Makita T. Tanimura J. Mikami N. et al. Jpn. J. Appl. Phys. 33 1994 5187
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 5187
- Kuroiwa, T.¹ Tsunemine, T.² Horikawa, T.³ Makita, T.⁴ Tanimura, J.⁵ Mikami, N.⁶

5
- 0034247760
- Chen X.F. Zhu W.G. Tan O.K. Mater. Sci. Eng. B77 2000 177
- (2000) Mater. Sci. Eng. , vol.77 B , pp. 177
- Chen, X.F.¹ Zhu, W.G.² Tan, O.K.³

6
- 0029369254
- Ichinose N. Ogiwara T. Jpn. J. Appl. Phys. 34 1995 5198
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 5198
- Ichinose, N.¹ Ogiwara, T.²

7
- 0001508391
- Hahn Y.B. Kim D.O. J. Vac. Sci. Technol. A17 1999 1982
- (1999) J. Vac. Sci. Technol. , vol.17 A , pp. 1982
- Hahn, Y.B.¹ Kim, D.O.²

8
- 0035309447
- Yoo D.C. Lee J.Y. J. Cryst. Growth 224 2001 251
- (2001) J. Cryst. Growth , vol.224 , pp. 251
- Yoo, D.C.¹ Lee, J.Y.²

9
- 0000482355
- Yoneda Y. Okabe T. Sakaue K. Terauchi H. Kasatani H. Deguchi K. J. Appl. Phys. 83 1998 2458
- (1998) J. Appl. Phys. , vol.83 , pp. 2458
- Yoneda, Y.¹ Okabe, T.² Sakaue, K.³ Terauchi, H.⁴ Kasatani, H.⁵ Deguchi, K.⁶

10
- 0001249424
- Tachiki M. Noda M. Yamada K. Kobayashi T. J. Appl. Phys. 83 1998 5351
- (1998) J. Appl. Phys. , vol.83 , pp. 5351
- Tachiki, M.¹ Noda, M.² Yamada, K.³ Kobayashi, T.⁴

11
- 78649785930
- Gao Y. Mueller A.H. Irene E.A. Auciello O. Krauss A. Schultz J.A. J. Vac. Sci. Technol. A17 1999 1880
- (1999) J. Vac. Sci. Technol. , vol.17 A , pp. 1880
- Gao, Y.¹ Mueller, A.H.² Irene, E.A.³ Auciello, O.⁴ Krauss, A.⁵ Schultz, J.A.⁶

12
- 0034188054
- Ding Y. Jin C. Meng Z. Mater. Res. Bull. 35 2000 1187
- (2000) Mater. Res. Bull. , vol.35 , pp. 1187
- Ding, Y.¹ Jin, C.² Meng, Z.³

13
- 0034826021
- Chung H.J. Choi J.H. Lee J.Y. Woo S.I. Thin Solid Films 382 2001 106
- (2001) Thin Solid Films , vol.382 , pp. 106
- Chung, H.J.¹ Choi, J.H.² Lee, J.Y.³ Woo, S.I.⁴

14
- 0035973336
- Baba S. Numata K. Saito H. Kumagai M. Ueno T. Kyoh B. et al. Thin Solid films 390 2001 70
- (2001) Thin Solid Films , vol.390 , pp. 70
- Baba, S.¹ Numata, K.² Saito, H.³ Kumagai, M.⁴ Ueno, T.⁵ Kyoh, B.⁶

15
- 0042198252
- Nagoya, Japan, Surf. Coat. Technol. submitted for publication
- S. Miyake, S. Baba, A. Niino, K. Numata, Frontiers of Surface Engineering 2001, Nagoya, Japan, Surf. Coat. Technol. (2001), submitted for publication
- (2001) Frontiers of Surface Engineering 2001
- Miyake, S.¹ Baba, S.² Niino, A.³ Numata, A.⁴

16
- 0034245161
- Baba S. Miyake S. Jpn. J. Appl. Phys. 39 2000 4945
- (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 4945
- Baba, S.¹ Miyake, S.²

17
- 0035822441
- Bykov Y.V. Rybakov K.I. Semenov V.E. J. Phys. D34 2001 R55
- (2001) J. Phys. , vol.34 D
- Bykov, Y.V.¹ Rybakov, K.I.² Semenov, V.E.³

18
- 0000456497
- Janney M.A. Kimrey H.D. Mater. Res. Soc. Sym. Proc. 189 1991 215
- (1991) Mater. Res. Soc. Sym. Proc. , vol.189 , pp. 215
- Janney, M.A.¹ Kimrey, H.D.²

19
- 0042198254
- Chengdu, China, submitted for publication
- S. Miyake, Proceeding of 3rd International Conference on Surface Engineering (ICSE 2002), Chengdu, China (2002), submitted for publication
- (2002) Proceeding of 3rd International Conference on Surface Engineering (ICSE 2002)
- Miyake, S.¹

20
- 0030128980
- Wroe R. Rowley A.T. J. Mater. Sci. 31 1996 2019
- (1996) J. Mater. Sci. , vol.31 , pp. 2019
- Wroe, R.¹ Rowley, A.T.²

21
- 0042198253
- Seoul, Korea, June
- Ueno T. Makino Y. Miyake S. Sano S. Saito H. Proceeding of NEF3 and IMA, Seoul, Korea, June 1999
- (1999) Proceeding of NEF3 and IMA
- Ueno, T.¹ Makino, Y.² Miyake, S.³ Sano, S.⁴ Saito, H.⁵

22
- 0002116167
- Rothman S.J. Mater. Res. Soc. Symp. Proc. 347 1994 9
- (1994) Mater. Res. Soc. Symp. Proc. , vol.347 , pp. 9
- Rothman, S.J.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.