Fabrication of microreactors in photostructurable glass by 3D femtosecond laser direct write

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5339, Issue , 2004, Pages 205-213

  Sugioka, Koji ^a   Cheng, Ya ^a   Masuda, Masashi ^a   Midorikawa, Katsumi ^a   Shihoyama, Kazuhiko ^b  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^b Hoya CANDEO OPTRONICS   (Japan)

Author keywords

TAS; 3 D micromchining; Femtosecond laser; Mechanism; Metal plating; Microchannel; Microreactor; Photostructurable glass

Indexed keywords

FUNCTIONS; HEAT TREATMENT; LASER PULSES; MICROSTRUCTURE; MIXING; PLATING;

Μ-TAS (MICRO TOTAL ANALYSIS SYSTEM); 3-D MICROMACHINING; FEMTOSECOND LASER; MECHANISM; MICROCHANNEL; MICROREACTOR; PHOTOSTRUCTURABLE GLASS;

GLASS;

EID: 5444229865     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.531630     Document Type: Conference Paper

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