Tribological evaluation of Si-O containing diamond-like carbon films

Surface and Coatings Technology

Volumn 162, Issue 2-3, 2003, Pages 183-188

  Jae Yang, Won ^a,c   Choa, Yong Ho ^a   Sekino, Tohru ^b   Shim, Kwang Bo ^a   Niihara, Koichi ^b   Auh, Keun Ho ^a  

^a Hanyang University   (South Korea)

^b OSAKA UNIVERSITY   (Japan)

^c NONE   (South Korea)

Author keywords

Diamond like film; PECVD; Raman; SEM; Wear

Indexed keywords

ADHESION; BUCKLING; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICA; TRIBOLOGY; WEAR OF MATERIALS;

TRIBOMETERS;

DIAMOND LIKE CARBON FILMS;

COATING; DIAMOND-LIKE CARBON; MECHANICAL PROPERTY; TRIBOLOGY; WEAR RESISTANCE;

EID: 0037454538     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00583-2     Document Type: Article

References (19)