Reactively sputtered titania films as high temperature carbon monoxide sensors

Sensors and Actuators, B: Chemical

Volumn 106, Issue 2, 2005, Pages 810-815

  Dutta, Prabir K ^a   Frank, Marla ^a   Hunter, Gary W ^b   George, Michael ^c  

^a OHIO STATE UNIVERSITY   (United States)

^b NASA GLENN RESEARCH CENTER   (United States)

^c UNIVERSITY OF ALABAMA IN HUNTSVILLE   (United States)

Author keywords

Gas sensing; Thick film sensors

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON MONOXIDE; ELECTRON MICROSCOPY; GRAIN SIZE AND SHAPE; HIGH TEMPERATURE OPERATIONS; METALLIC FILMS; MICROSTRUCTURE; SPUTTERING; SURFACE ROUGHNESS; THIN FILMS; TITANIUM DIOXIDE;

CARBON MONOXIDE SENSORS; FILM THICKNESS; REACTIVE SPUTTERING; THICK FILM SENSORS;

CHEMICAL SENSORS;

EID: 17644400525     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.09.036     Document Type: Article

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