Deformation of Silicon Surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5179, Issue , 2003, Pages 203-214

  Lambropoulos, John C ^a,b,c   Chen, Kang Hua ^a   Lambropoulos, Theodore J ^d  

^a University of Rochester   (United States)

^b UNIVERSITY OF ROCHESTER   (United States)

^c UNIVERSITY OF ROCHESTER   (United States)

^d Pittsford Mendon High School   (United States)

Author keywords

Compliance; Phase transition; Residual forces; Reuss; Silicon; Stiffness; Stresses; Voigt

Indexed keywords

ANISOTROPY; CRYSTALLOGRAPHY; ELASTIC MODULI; GRINDING (MACHINING); HYDROSTATIC PRESSING; PHASE TRANSITIONS; SHEAR DEFORMATION; SHEAR STRESS; SURFACE PHENOMENA; THERMOMECHANICAL TREATMENT;

COMPLIANCE; RESIDUAL FORCE; REUSS; VOIGT;

SEMICONDUCTING SILICON;

EID: 1842479214     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.506332     Document Type: Conference Paper

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