The use of magnetorheological finishing (MRF) to relieve residual stress and subsurface damage on lapped semiconductor silicon wafers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4451, Issue , 2001, Pages 286-294

  Arrasmith, Steven R ^a   Jacobs, Stephen D ^a   Lambropoulos, John C ^a   Maltsev, Alexander ^a   Golini, Donald ^a   Kordonski, William I ^a  

^a UNIVERSITY OF ROCHESTER   (United States)

Author keywords

Magnetorheological finishing; MRF; Silicon wafers; Subsurface damage; Twyman effect

Indexed keywords

ABRASIVES; CHEMICAL FINISHING; COMPRESSIVE STRESS; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; OPTICAL GLASS; RESIDUAL STRESSES; SILICON WAFERS; SINGLE CRYSTALS; THICKNESS MEASUREMENT;

MAGNETORHEOLOGICAL FINISHING; SUBSURFACE DAMAGE; TWYMAN EFFECT;

OPTICAL TESTING;

EID: 0035760747     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.453627     Document Type: Conference Paper

References (21)

1. A. Lindquist, S. D. Jacobs, A. Feltz, "Surface Preparation Technique for Rapid Measurement of Sub-Surface Damage Depth," in Technical Digest of Science of Optical Finishing, 1990, (Optical Society of America, Washington, D. C., 1990), Vol. 9, pp. 57-60.
2. Yiyang Zhou, Paul D. Funkenbusch, David J. Quesnel, Donald Golini, and Arne Lindquist, "Effect of Etching and Imaging Mode on the Measurement of Subsurface Damage in Microground Optical Glasses," Journal of the American Ceramic Society 77, 3277-3280 (1994).
3. Lee Dettmann, "Estimation of Subsurface Damage Depth by Dimpling," in Technical Digest of Science of Optical Finishing, 1990, (Optical Society of America, Washington, D. C., 1990), Vol. 9, pp. 52-56.
4. J. C. Lambropoulos, Tong Fang, A. Lindquist, and D. Golini, The Twyman effect under loose abrasive lapping and deterministic microgrinding, Ceramics Transactions 70, 59-70 (1996).
5. E. G. Nikolova, Review: On the Twyman effect and some of its applications, J. Mater. Sci. 20, 1-8 (1985).
6. W. J. Rupp, "Twyman Effect for ULE," in Workshop on Optical Fabrication and Testing, (Optical Society of America, Washington, D. C., 1987), pp. 23-30.
7. J. C. Lambropoulos, S. Arrasmith, S. D. Jacobs, and D. Golini, "Manufacturing-induced residual stresses in optical glasses and crystals: Example of residual stress relief by magnetorheological finishing (MRF) in commercial silicon wafers," see these Proceedings.
8. S. D. Jacobs, S. R. Arrasmith, I. A. Kozhinova, L. L. Gregg, A. B. Shorey, H. J. Romanofsky, D. Golini, W. I. Konrdonski, P. Dumas, and S. Hogan, "Magnetorheological Finishing (MRF): Computer Controlled Optics Manufacturing," American Ceramic Society Bulletin 78 [12] 42-48 (1999).
9. A. B. Shorey, L. L. Gregg, H. J. Romanofsky, S. R. Arrasmith, I. Kozhinova, J. Hubregsen, S. D. Jacobs, "Study of material removal during magnetorheological finishing (MRF)," part of the SPIE Conference on Optical Manufacturing and Testing III, Denver Colorado, July 1999, SPIE 3782, pp. 101-109.
10. S. D. Jacobs, S. R. Arrasmith, I. A. Kozhinova, L. L. Gregg, A. B. Shorey, H. J. Romanofsky, D. Golini, W. I. Kordonski, P. Dumas and S. Hogan, "An Overview of Magnetorheological Finishing (MRF) for Precision Optics Manufacturing," Ceramic Transactions, 102, Finishing of Advanced Ceramics and Glasses, edited by R. Sabia, V. A. Greenhut, and C. G. Pantano, American Ceramic Society, Westerville, OH pp. 185-200, 1999.
11. TTI Silicon, 250 Sobrante Way, Sunnyvale, CA 94086-4807.
12. Average of measurements of 8 random sites/wafer with New View 5000™ surface profiler with following conditions: 20X Mirau objective; 20 μm bipolar scan; FDA Res: High; Min Mod: 5%; Min Area: 7, Zygo Corporation, Laurel Brook road, Middlefield, CT 06455.
13. Microgrit 5, 9, and 12 WCA alumina abrasives, Micro Abrasives Corporation, 720 Southampton Road, P.O. Box 669, Westfield, MA 01086-0669.
14. LA-900 particle size analyzer, by volume distributions, Horiba Instruments Incorporated, 17671 Armstrong, Irvine Industrial Complex, Irvine, CA 92614.
15. Grade 50, 1.573" diameter steel ball, Excelsior Steel Ball Inc., 303 Woodward Ave., Buffalo, NY 14217.
16. 0.25 μm Spectrum diamond paste, formula D57 Ivory, Penn Scientific Co., Inc., Abington, PA 19001.
17. K. A. Richardson, Infrared Materials Database, Volume 2, University of Central Florida-CREOL, March 1995.
18. Q22 Magnetorheological Finishing machine, QED Technologies, 1040 University Av., Rochester, NY 14607.
19. ZYGO GPIxpHR™ laser interferometer, ZYGO Corp., Middlefield, CT, 06455.
20. Optical grade silicon, Lattice Materials Corp., 516 E. Tamarack Street, Bozemon, MT 59715.
21. John Lambropoulos, "What Material Science CAN DO for Optics Manufacturing," 2001 COM Summer School Class Notes, p. 71. Copies may be requested through the principle author.