Design of a piezoelectrically-driven hydraulic amplification microvalve for high pressure, high frequency applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3985, Issue , 2000, Pages 616-628

  Roberts, David C ^a   Hagood, Nesbitt W ^a   Su, Yu Hsuan ^a   Li, Hanqing ^a   Carretero, Jorge A ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; FLOW OF FLUIDS; HYDRAULIC AMPLIFIERS; MATHEMATICAL MODELS; MICROMACHINING; PIEZOELECTRIC MATERIALS;

HYDRAULIC AMPLIFICATION; MICROVALVE;

VALVES (MECHANICAL);

EID: 0033691521     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.388857     Document Type: Conference Paper

References (13)