Model order reduction of 3D electro-thermal model for a novel micromachined hotplate Gas sensor

Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004

Volumn , Issue , 2004, Pages 263-267

  Bechtold, Tamara ^a   Hildenbrand, Jürgen ^a   Wöllenstein, Jürgen ^b   Korvink, Jan G ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b FRAUNHOFER INSTITUTE FOR PHYSICAL MEASUREMENT TECHNIQUES IPM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; CURRENT DENSITY; ELECTRIC CURRENTS; GLASS; HEAT CONDUCTION; HEATING; MATHEMATICAL MODELS; SILICON WAFERS; THERMAL CONDUCTIVITY;

ELECTRO-THERMAL MODEL; GLASS STRUCTURE; MASS DENSITY; THERMAL MANAGEMENT;

CHEMICAL SENSORS;

EID: 3843105780     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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