Design and fabrication of piezoresistive cantilever microaccelerometer arrays with a symmetrically bonded proof-mass

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 353-356

  Ko, Jong Soo ^a   Cho, Young Ho ^a   Kwak, Byung Man ^a   Park, Kwanhum ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTRONIC EQUIPMENT MANUFACTURE; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS;

PIEZORESISTIVE CANTILEVER MICROACCELEROMETERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032294206     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)