Robust optimization using a gradient index: MEMS applications

Structural and Multidisciplinary Optimization

Volumn 27, Issue 6, 2004, Pages 469-478

  Han, J S ^a   Kwak, B M ^b  

^a UNIVERSITY OF FREIBURG   (Germany)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Fabrication errors; Gradient index; MEMS; Micro accelerometer; Resonant type micro probe; Robust optimization

Indexed keywords

ACCELEROMETERS; ERROR ANALYSIS; GRADIENT METHODS; MONTE CARLO METHODS; OPTIMIZATION; PROBABILITY; ROBUSTNESS (CONTROL SYSTEMS); SENSITIVITY ANALYSIS; VECTORS;

FABRICATION ERRORS; GRADIENT INDEX; MICRO ACCELEROMETER; RESONANT-TYPE MICRO PROBE; ROBUST OPTIMIZATION;

MICROELECTROMECHANICAL DEVICES;

EID: 4344569112     PISSN: 1615147X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00158-004-0410-3     Document Type: Article

References (17)

1. Belegundu, A.D.; Zhang, S. 1992: Robustness of design through minimum sensitivity. J. Mech. Des. 114, 213-217
2. Sundaresan, S.; Ishii, K.; Houser, D.R. 1995: A robust optimization procedure with variations on design variables and constraints. Eng. Optim. 24, 101-117
3. Lee, K.H.; Park, G.J. 2001: Robust optimization considering tolerances of design variables. Comput. Struct. 79, 77-86
4. Chen, W.; Allen, J.K.; Tsui, K.L. 1996: A procedure for robust design: minimizing variations caused by noise factors and control factors. ASME J. Mech. Des. 118, 478-485
5. Nikolaidis, E.; Burdisso, R. 1988: Reliability based optimization: a safety index approach. Comput. Struct. 28, 781-788
6. Rao, S.S. 1980: Structural optimization by chance constrained programming techniques. Comput. Struct. 12, 777-781
7. Kwak, B.M.; Lee, T.W. 1987: Sensitivity analysis for reliability-based optimization using an AFOSM method. Comput. Struct. 27(3), 399-406
8. Jung, D.H.; Lee, B.C. 2002: Development of a simple and efficient method for robust optimization. Int. J. Numer. Meth. Engng. 53, 2201-2215
9. Han, J.S.; Kwak, B.M. 2001: Robust optimal design of a vibratory micro gyroscope considering fabrication errors. J. Micromech. Microeng. 11, 662-671
10. Liu, R.; Paden, B.; Turner, K. 2002: MEMS resonators that are robust to process-induced feature width variations. J. Microelectromech. Syst. 11(5), 505-511
11. Delauche, F.; Affour, B.; Dufaza, C. 2002: Parametric yield optimization of MEMS. Design, Test, Integration, and Packaging of MEMS/MOEMS, Proc. SPIE. 4755, 126-135
12. Muchow, J.; Kretschmann, A.; Henn, R.; Skrobanek, K.; Finkbeiner, S.; Krauss, H.R. 2002: Influence of process variation on the functionality of a high pressure sensor. Design, Test, Integration, and Packaging of MEMS/MOEMS, Proc. SPIE. 4755, 143-148
13. Germer, C.; Hansen, U.; Franke, H.J.; Buttgenbach, S. 2002: Tolerance analysis and synthesis in micro systems. Design, Test, Integration, and Packaging of MEMS/MOEMS, Proc. SPIE. 4755, 355-364
14. ABAQUS Theory manual version 5.8. 1998: Hibbitt, Karlsson and Sorensen, Inc.
15. DOT Users manual version 4.20. 1995: VR&D
16. Ko, J.S.; Cho, Y.H.; Kwak, B.M.; Park, K. 1998: Design and fabrication of piezoresistive cantilever microaccelerometer arrays with a symmetrically bonded proof-mass. IMECE '98, ASME, (Anaheim, CA), pp 353-356
17. Lebrasseur, E.; Bourouina, T.; Pourciel, J.; Ozaki, M.; Masuzawa, T.; Fujita, H. 2000: Resonant-type micro-probe for vertical profiler. International Conference on Modeling and Simulation of Microsystems, pp 285-288