Micromirror actuation with electrostatic force and plate bending

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3899, Issue , 1999, Pages 117-123

  Han, Seungoh ^a   Park, Hojoon ^a   Pak, Jungho ^a  

^a Korea University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); ELECTROSTATICS; MATHEMATICAL MODELS; MICROMACHINING;

ELECTROSTATIC DRIVING; MICROMIRRORS;

MIRRORS;

EID: 0033326420     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)