UV-LIGA microfabricated of a power relay based on electrostatic actuation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4981, Issue , 2003, Pages 122-130

  Yang, Ren ^a   Jeong, Seok J ^a   Wang, Wanjun ^a  

^a Louisiana State University   (United States)

Author keywords

Electrostatic actuation; Functional material; Micro relay; Power; UV LIGA, SU 8

Indexed keywords

ASPECT RATIO; ELECTRIC INSULATORS; ELECTROSTATIC ACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MULTILAYERS;

POWER RELAYS;

ELECTRIC RELAYS;

EID: 0037721467     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478171     Document Type: Conference Paper

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