Depolarization/mixed polarization corrections of ellipsometry spectra

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 97-101

  Rossow, U ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Depolarization; Ellipsometry; Mixed polarizations; RDS; Wedge like layer

Indexed keywords

ENERGY GAP; LIGHT INTERFERENCE; LIGHT MODULATION; LIGHT POLARIZATION; LIGHT REFLECTION; MATRIX ALGEBRA; SPECTROSCOPY;

MULLER MATRICES; REFLECTANCE DIFFERENCE SPECTROSCOPY (RDS);

ELLIPSOMETRY;

EID: 0032000202     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00777-3     Document Type: Article

References (13)

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2. R.F. Schnabel, U. Rossow, A. Krost, D. Bimberg, W. Richter, unpublished.
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4. U. Rossow, Th. Werninghaus, W. Richter, in: B. Lengeler, H. Lüth, W. Mönch, J. Pollmann (Eds.), Identification of Interface Layers by Spectroscopic Ellipsometry, Proceedings of the ICFSI-4 Jülich, 14-18 June 1993, World Scientific Press Singapore, New Jersey, London, Hong Kong, 1994, pp. 680-683.
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