Electrostatic batch assembly of surface MEMS using ultrasonic triboelectricity

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 10-13

  Kaajakari, V ^a   Lal, A ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

POLYSILICON; SILICON NITRIDE; SPRINGS (COMPONENTS); SUBSTRATES; TRIBOELECTRICITY; ULTRASONIC EFFECTS; VIBRATIONS (MECHANICAL);

ELECTROSTATIC BATCH ASSEMBLY; ULTRASONIC VIBRATONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034998690     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)