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Volumn 245, Issue 1-4, 2005, Pages 109-113
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Dependence of properties of N-Al codoped p-type ZnO thin films on growth temperature
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Author keywords
dc reactive magnetron sputtering; N Al codoping method; p Type conduction; ZnO thin films
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Indexed keywords
ALUMINUM;
CARRIER CONCENTRATION;
DOPING (ADDITIVES);
FILM GROWTH;
LIGHT TRANSMISSION;
MAGNETRON SPUTTERING;
OPTICAL PROPERTIES;
TEMPERATURE DISTRIBUTION;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
X RAY PHOTOELECTRON SPECTROSCOPY;
ZINC OXIDE;
DC REACTIVE MAGNETRON SPUTTERING;
N-AL CODOPING METHOD;
P-TYPE CONDUCTION;
ZNO THIN FILMS;
NITROGEN;
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EID: 17144419709
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2004.09.112 Document Type: Article |
Times cited : (20)
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References (16)
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