Wet chemical etching of lead zirconate titanate thin film for microelectro-mechanical systems applications

Ferroelectrics

Volumn 263, Issue 1, 2001, Pages 33-38

  Lin, Yinyin ^a   Liu, Qin ^b   Tang, Tingao ^a   Yao, Xi ^b   Huang, Weining ^a  

^a FUDAN UNIVERSITY   (China)

^b XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Etching; MEMS; PZT

Indexed keywords

ETCHING RATE; LEAD ZIRCONATE TITANATE THIN FILMS; METALORGANIC DECOMPOSITION METHOD; MICRO ELECTRO MECHANICAL SYSTEM; PATTERN TRANSFERS; PATTERNED FEATURES; PZT; SEMICONDUCTOR PROCESS; SMALL GRAINS; WET-CHEMICAL ETCHING;

COMPOSITE MICROMECHANICS; DECOMPOSITION; FITS AND TOLERANCES; MEMS; MICROELECTROMECHANICAL DEVICES; THIN FILMS;

WET ETCHING;

EID: 17044367335     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/00150190108225175     Document Type: Conference Paper

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