F2-laser microfabrication for integrating optical circuits with microfluidic biochips

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5591, Issue , 2004, Pages 96-103

  Ho, Stephen ^a   Aitchison, J Stewart ^a   Eaton, Shane ^a   Herman, Peter Robert ^a   Li, Jianzhao ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

Lab on a chip; Laser micromachining; Microfluidics; Optical circuits; Sensors

Indexed keywords

FABRICATION; FUSED SILICA; INSERTION LOSSES; LASER ABLATION; MICROMACHINING; OPTICAL DEVICES; OPTICAL WAVEGUIDES; REFRACTIVE INDEX; SENSORS;

LAB-ON-CHIP; LASER MICROMACHINING; MICROFLUIDICS; OPTICAL CIRCUITS;

MICROPROCESSOR CHIPS;

EID: 16644394389     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.571338     Document Type: Conference Paper

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