Fabrication of integrated microanalytical chambers and channels for biological assays using flame hydrolysis deposition glass

Microelectronic Engineering

Volumn 46, Issue 1, 1999, Pages 419-422

  Ruano, J M ^a   Ortega, D ^a   Bonar, J R ^a   McLaughlin, A J ^a   Jubber, M G ^a   Cooper, J M ^a   Aitchison, J S ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ETCHING; FLUORESCENCE; HYDROLYSIS; MICROPROCESSOR CHIPS; OPTICAL GLASS; OPTICAL WAVEGUIDES;

BIOLOGICAL ASSAYS; FLAME HYDROLYSIS DEPOSITION (FHD);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0033131678     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00123-9     Document Type: Article

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