메뉴 건너뛰기




Volumn 4274, Issue , 2001, Pages 149-157

F2-lasers: High-resolution optical processing system for shaping photonic components

Author keywords

F2 laser; Laser micromachining; Optical system; Photonics fabrication; Photosensitivity; Refractive index

Indexed keywords

FUSED SILICA; LASER APPLICATIONS; LIGHT; MANUFACTURE; MICROELECTRONICS; OPTICAL MATERIALS; OPTICAL SYSTEMS; PHOTOSENSITIVITY; REFRACTIVE INDEX;

EID: 85076738092     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.432547     Document Type: Conference Paper
Times cited : (26)

References (17)
  • 12
    • 85076764615 scopus 로고    scopus 로고
    • http://www.sematech.org
  • 13
    • 85076725538 scopus 로고    scopus 로고
    • High-resolution 157nm micromachining of polymers
    • appearing
    • M.C. Gower, J.S. Cashmore, P. Gruenewald, High-resolution 157nm micromachining of polymers, appearing in SPIE 4274 (2001).
    • (2001) SPIE , vol.4274
    • Gower, M.C.1    Cashmore, J.S.2    Gruenewald, P.3
  • 14
    • 85076795741 scopus 로고    scopus 로고
    • Ablation-induced stresses in fused silica by 157-nm F2-laser irradiation, appearing in Laser-Solid Interactions for Materials Processing
    • I.A. Konovalov, P.R. Herman, Ablation-induced stresses in fused silica by 157-nm F2-laser irradiation, appearing in Laser-Solid Interactions for Materials Processing, MRS Proc. 617 (2000).
    • (2000) MRS Proc. , pp. 617
    • Konovalov, I.A.1    Herman, P.R.2
  • 17


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.