F2-lasers: High-resolution optical processing system for shaping photonic components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4274, Issue , 2001, Pages 149-157

  Herman, Peter R ^a   Chen, Kevin P ^a   Wei, Midori ^a   Zhang, Jie ^a   Ihlemann, Jürgen ^b   Schäfer, Dirk ^b   Marowsky, Gerd ^b   Oesterlin, Peter ^c   Burghardt, Berthold ^c  

^a UNIVERSITY OF TORONTO   (Canada)

^b LASER LABORATORIUM GÖTTINGEN E V   (Germany)

^c MicroLas Lasersystem GmbH   (Germany)

Author keywords

F2 laser; Laser micromachining; Optical system; Photonics fabrication; Photosensitivity; Refractive index

Indexed keywords

FUSED SILICA; LASER APPLICATIONS; LIGHT; MANUFACTURE; MICROELECTRONICS; OPTICAL MATERIALS; OPTICAL SYSTEMS; PHOTOSENSITIVITY; REFRACTIVE INDEX;

COMMUNICATION COMPONENTS; F2 LASERS; HIGH RESOLUTION OPTICS; LASER MICRO-MACHINING; MANUFACTURING FIELDS; MATERIAL INTERACTIONS; OPTICAL PROCESSING SYSTEMS; PHOTONIC COMPONENTS;

OPTICAL COMMUNICATION;

EID: 85076738092     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.432547     Document Type: Conference Paper

References (17)

1. P.R. Herman, K. Beckley, R.A. Potyrailo, VUV holographic gratings etched by a single F2 laser pulse, CLEO (OSA 1994)
2. P.R. Herman, K. Beckley, B. Jackson, K. Kurosawa, D. Moore, T. Yamanishi, J. Yang, Proc. SPIE 2992, 86 (1997)
3. P.R. Herman, R.S. Marjoribanks, A. Oettl, K. Chen, I. Konovalov, S. Ness, Appl. Surf. Sci. 154-155, 577 (2000)
4. P.R. Herman, K.P. Chen, P. Corkum, A. Naumov, S. Ng, J. Zhang, Advanced laser microfabrication of photonic components, appearing in SPIE Proc. 4088 (2000)
5. J. Fair, E. Mayer, M. Scaggs, D. Basting, Lambda Highlights 56, 7 (2000)
6. P.E. Dyer, J. Sidhu, JOSA B 3, 792 (1986)
7. M. Lapczyna, M. Stuke, Appl. Phys. A 66, 473 (1998)
8. M. Lapczyna, M. Stuke, Mat. Res. Symp. Proc. Vol 526, 143 (1998)
9. M. Fiebig, M. Kauf, J. Fair, H. Endert, M. Rahe, D. Basting, Appl. Phys. A 69, S305 (1999)
10. P.R. Herman, B. Chen, D.J. Moore, MRS Proc. 285, 163 (1993);
11. P.R. Herman, B. Chen, D.J. Moore, M. Canaga- Retnam, MRS Proc. 236, 53 (1992)
12. http://www.sematech.org
13. M.C. Gower, J.S. Cashmore, P. Gruenewald, High-resolution 157nm micromachining of polymers, appearing in SPIE 4274 (2001).
14. I.A. Konovalov, P.R. Herman, Ablation-induced stresses in fused silica by 157-nm F2-laser irradiation, appearing in Laser-Solid Interactions for Materials Processing, MRS Proc. 617 (2000).
15. D. Schäfer, J. Ihlemann, G. Marowsky, P.R. Herman, F2-Laser ablation patterning of dielectric layers, appearing in App. Phys. A., (2001).
16. K.P. Chen, P.R. Herman, R. Tam, J. Zhang, Electr. Lett. 36, 2000 (2000).
17. J. Zhang, P.R. Herman, C. Lauer, K.P. Chen, M. Wei, 157-nm laser-induced modification of fused-silica glasses, in SPIE Proc. 4274, 2001.