Atomic-resolution measurements with a new tunable diode laser-based interferometer

Optical Engineering

Volumn 43, Issue 1, 2004, Pages 79-86

  Silver, Richard M ^a   Zou, H ^b   Gonda, S ^c   Damazo, B ^a   Jun, J ^a   Jensen, C ^d   Howard, L ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^d TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Atomic resolution; Birefringence; Frequency measurement; Interferometer; Picometer resolution; Tunable diode laser

Indexed keywords

ATOMIC RESOLUTION; FREQUENCY MEASUREMENT; PICOMETER RESOLUTION; TUNABLE DIODE LASER;

BIREFRINGENCE; INTERFEROMETERS; LASER TUNING; NATURAL FREQUENCIES; OPTICAL RESOLVING POWER; OPTICAL VARIABLES MEASUREMENT; ULTRAHIGH VACUUM; UNCERTAIN SYSTEMS;

SEMICONDUCTOR LASERS;

EID: 1642587782     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1631002     Document Type: Article

References (12)

1. The International Technology Roadmap for Semiconductors (ITRS), Semiconductor Industry Association (SIA), p. 145 (1999).
2. R. M. Silver, C. P. Jensen, V. Tsai, J. Fu, J. Villarrubia, and E. C. Teague, "Developing a method to determine linewidth based on counting the atom-spacings across a line," Proc. SPIE 3332, 441-460 (1998).
3. R. Dixson, R. Koening, J. Fu, T. Vorburger, and B. Reneger, "Accurate dimensional metrology with atomic force microscopy," Proc. SPIE 3998, 362-368 (2000).
4. S. Gonda, T. Doi, T. Kurosawa, Y. Tanimura, N. Hisata, T. Yamagishi, H. Fujimoto, and H. Yukawa, Rev. Sci. Instrum. 70, 3362-3368 (1999).
5. S. Gonda, H. Zhou, J. Fu, and R. M. Silver, "A new design and uncertainty budget for a metrology UHV-STM used in direct measurements of atom spacings," Proc. SPIE 4608, 125-131 (2002).
6. A. Yacoot and M. J. Downs, Meas. Sci. Technol. 11, 1126-1130 (2000).
7. L. P. Howard, J. Stone, and J. Fu, "Real-time displacement measurements with a Fabry-Perot cavity and a diode laser," Precision Eng. 25, 321 (2001).
8. Y. Zhu, H. Matsumoto, and T. O'ishi, Appl. Opt. 30, 3561-3562 (1991).
9. G. P. Barwood, P. Gill, and W. R. C. Rowley, Meas. Sci. Technol. 4, 988-994 (1993).
10. S. Wetzels and P. Schellekens, "Development of a traceable laser-based displacement calibration system with nanometer accuracy," CIRP Annals, 46/1 (1997).
11. J. Stone and L. P. Howard, "A simple technique for observing periodic non-linearities in Michelson interferometers," Precision Eng, 4, 220 (1998).
12. R. M. Silver, J. Jun, E. Kornegay, and R. Morton, "Comparison of edge detection methods using a prototype overlay calibration artifact," Proc. SPIE 4344, 515-529 (2001).