A new design and uncertainty budget for a metrology UHV-STM used in direct measurements of atom spacings

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4608, Issue , 2002, Pages 125-131

  Gonda, Satoshi ^a,b   Zhou, Hui ^a   Fu, Joseph ^a   Silver, Richard M ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL LATTICES; ELECTRONIC STRUCTURE; HELIUM NEON LASERS; INTERFEROMETRY; NANOSTRUCTURED MATERIALS; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTOR LASERS; SINGLE CRYSTALS; SURFACE TREATMENT; ULTRAHIGH VACUUM;

ATOM SPACINGS; SPACIAL PERIODICITY; TRACEABLE LASER INTERFEROMETERS;

NANOTECHNOLOGY;

EID: 0036029278     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.465125     Document Type: Article

References (9)

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