Magnetron-sputtered Hydrogenated Carbon Nitride: Structural and Optical Properties of As-deposited and Postannealed Films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 11, 2003, Pages 7057-7061

  Vinod, Purayath Robert ^a,b   Nakamura Itakura, Akiko ^b   Kitajima, Masahiro ^b   Terai, Takayuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Antireflection coating; Carbon nitride; Ellipsometry; Extinction coefficient; Refractive index; Thermal annealing

Indexed keywords

ANTIREFLECTION COATINGS; ARSENIC; CARBON NITRIDE; DEPOSITION; ELLIPSOMETRY; GRAPHITE; HYDROGENATION; LIGHT EXTINCTION; MAGNETRON SPUTTERING; MOLECULAR STRUCTURE; OPTICAL FILMS; RAPID THERMAL ANNEALING; REFRACTIVE INDEX; SILICA; ULTRATHIN FILMS; WEAR RESISTANCE;

COVALENT BONDS;

AMORPHOUS FILMS;

EID: 1642528901     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.7057     Document Type: Article

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