Investigation on nitrogenated DLC films for anti-reflection coating application

International Journal of Modern Physics B

Volumn 16, Issue 6-7, 2002, Pages 1008-1012

  Vinod, P R ^a   Kakiuchi, H ^a   Terai, T ^a   Itakura, A N ^b   Kitajima, M ^b  

^a UNIVERSITY OF TOKYO   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

AFM; Anti reflection coating; Diamond like carbon; Ellipsometry; FT IR; XPS

Indexed keywords

CARBON;

CHEMICAL ANALYSIS; CONFERENCE PAPER; ELLIPSOMETRY; FILM; MATERIAL COATING; MICROWAVE OVEN; THICKNESS;

EID: 0037139124     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/s0217979202010774     Document Type: Conference Paper

References (11)

1. Optical characterization of Real surfaces and Thin films
2. The influence of diamond-like carbon films on the properties of silicon solar cells