Precursors of diamond films analysed by molecular beam mass spectrometry of microwave plasmas

Diamond and Related Materials

Volumn 13, Issue 1, 2004, Pages 116-124

  Aubry, O ^a   Delfau, J L ^a   Met, C ^a   Vandenbulcke, L ^a   Vovelle, C ^a  

^a CNRS   (France)

Author keywords

Diamond film; Mass spectrometry; Radicals; Structure

Indexed keywords

DIAMOND DEPOSITS; MASS SPECTROMETRY; MOLECULAR BEAMS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SAMPLING;

RESIDENCE TIME;

DIAMOND FILMS;

DIAMOND; FILM;

EID: 1642481290     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2003.09.009     Document Type: Article

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