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Thin Solid Films

Volumn 316, Issue 1-2, 1998, Pages 18-23

Diamond deposition procedure from microwave plasmas using a mixture of CO2-CH4 as carbon source

(2) Itoh, Ken Ichi a Matsumoto, Osamu a

a AOYAMA GAKUIN UNIVERSITY (Japan)

Author keywords

Adsorbed CO; CO2 CH4 gas mixture; Diamond deposition; Microwave plasma

Indexed keywords

ABSORPTION; DEPOSITION; MICROWAVES; MOLYBDENUM; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; X RAY CRYSTALLOGRAPHY; X RAY PHOTOELECTRON SPECTROSCOPY;

MICROWAVE PLASMAS;

DIAMOND FILMS;

EID: 0032024106 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)00381-2 Document Type: Article

Times cited : (15)

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