Modelling of the gas phase chemistry during diamond CVD: The role of different hydrocarbon species

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 242-245

  Tsang, R S ^a   May, P W ^a   Ashfold, M N R ^a  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

Catalytic processes; Computer simulation; Gas phase; Mass spectrometry

Indexed keywords

ACETYLENE; CATALYSIS; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; COMPUTER SIMULATION; COMPUTER SOFTWARE; ETHANE; ETHYLENE; FILM GROWTH; METHANE; THERMODYNAMIC STABILITY; THIN FILMS;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION (HFCVD);

DIAMOND FILMS;

EID: 0032607201     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00257-x     Document Type: Article

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