Evaluation of cluster tool throughput for thin film head production

Winter Simulation Conference Proceedings

Volumn 1, Issue , 1999, Pages 714-719

  Koehler, Eric J ^a   Wulf, Timbur M ^a   Bruska, Alvin C ^a   Seppanen, Marvin S ^a  

^a SEAGATE TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CONTAMINATION; COST EFFECTIVENESS; DEPOSITION; MAGNETIC HEADS; OXIDATION; PARALLEL PROCESSING SYSTEMS; PLANNING; PROBABILITY; THIN FILMS; THROUGHPUT;

CLUSTER TOOL CYCLE; CLUSTER TOOL PROCESSING; STATIC PROBABILITY BASED MODEL PREDICTIONS; THIN FILM HEAD PRODUCTION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0033347319     PISSN: 02750708     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1145/324138.324465     Document Type: Conference Paper

References (3)