Model of a 300MM wafer fabrication line

Winter Simulation Conference Proceedings

Volumn 1, Issue , 1999, Pages 909-911

  Campbell, Philip L ^a   Rohan, Darius ^a   MacNair, Edward A ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER INTEGRATED MANUFACTURING; COMPUTER SIMULATION; DECISION MAKING; FACTORY AUTOMATION; MATERIALS HANDLING; MATHEMATICAL MODELS; SYSTEMS ANALYSIS;

AUTOMATED MATERIAL HANDLING SYSTEMS; OPERATIONS MANAGEMENT POLICIES; TOOL PROCESSING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0033333314     PISSN: 02750708     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)